Physics-informed data-driven machine health monitoring for two-photon lithography
基于物理信息的数据驱动机健康监测用于双光子光刻
机构 * Department of Mechanical Engineering, University of Michigan, Ann Arbor, MI 48109, United States(密歇根大学安娜堡分校机械工程系) ; Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, United States(伊利诺伊大学厄巴纳-香槟分校机械科学与工程系)
AI总结 本文提出三种方法,结合物理信息数据驱动预测模型与统计方法,实现双光子光刻机健康状态的准确及时监测,通过实验验证其高准确度、鲁棒性和泛化能力。
Journal ref Journal of Manufacturing Processes 166 (2026) 319 - 329