Physics-informed generative AI for semiconductor manufacturing: Enforcing hard physical constraints in generative models by construction
物理信息驱动的生成式AI在半导体制造中的应用:通过构造强制生成模型中的硬物理约束
Yaser Mike Banad, Sarah Sharif
机构
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School of Electrical and Computer Engineering, University of Oklahoma(俄克拉荷马大学电气与计算机工程学院)
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Center for Quantum Research and Technology, University of Oklahoma(俄克拉荷马大学量子研究与技术中心)
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Intelligent Neuromorphic and Quantum Understanding for Innovative Research and Engineering (INQUIRE) Laboratory(创新研究与工程智能神经形态与量子理解实验室)
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Material Science and Engineering Program, University of Oklahoma, Norman, OK 73019 USA(俄克拉荷马大学材料科学与工程项目,Norman, OK 73019 USA)
专题命中
多模态生成
:multimodal(abstract);multimodal foundation model(abstract);分类 cs.AI
机构
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Meituan(美团)
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MBZUAI(Mohamed bin Zayed University of Artificial Intelligence)
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Huazhong University of Science and Technology(华中科技大学)
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Peking University(北京大学)
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Tsinghua University(清华大学)
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The Chinese University of Hong Kong(香港中文大学)
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Shanghai Jiao Tong University(上海交通大学)