Substrate insulated Josephson junctions for superconducting quantum circuits
用于超导量子电路的衬底绝缘约瑟夫森结
U. Strobel (1), L. Radtke (1), L. Kamps (2), J. N. Voss (1), J. Lisenfeld (1), J. Luo-Hofmann (2), D. Reuter (2), S. Masis (1), A. V. Ustinov (1 and 3), H. Rotzinger (1 and 3) ((1) Physikalisches Institut, Karlsruher Institut für Technologie, (2) Fraunhofer-Institut für Elektronische Nanosysteme, Chemnitz, (3) Institut für Quantenmaterialien und Technologie, Karlsruher Institut für Technologie)
AI总结 开发了一种利用三维图案化低损耗衬底替代有机抗蚀剂的约瑟夫森结制备技术,可制造高质量三层结,避免引入导致退相干的氧化物和有机材料,适用于高速高温量子电路。
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- 9 pages, 7 figures
我们开发了一种约瑟夫森结的制备技术,该技术采用三维图案化的低损耗衬底,替代了常用的有机抗蚀剂。该技术能够从广泛的几何形状和材料中制造高质量的三层结,包括高熔点超导体如钽或铌。结电极不含故意引入的氧化物和有机材料,这些已知是退相干的来源。我们制备并表征了不同尺寸和几何形状的欠阻尼 Nb/AlOx/Nb 结。此类结使得制造在更高速度和更高温度下运行的量子电路成为可能。
We have developed a fabrication technique for Josephson junctions that employs a three-dimensional patterned, low-loss substrate instead of commonly used organic resists. The technique enables the fabrication of high-quality trilayer junctions from a wide range of geometries and materials, including high-melting-point superconductors such as tantalum or niobium. The junction electrodes are free from intentionally introduced oxides and organic materials, which are known sources of decoherence. We fabricate and characterize underdamped Nb/AlOx/Nb junctions of different sizes in several geometries. Such junctions enable manufacturing of quantum circuits operating at higher speeds and elevated temperatures.